This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technolo

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for proces

In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and