Silicon, the basic material for a multibillion-dollar industry, is the most widely researched and applied semiconductor, and its surfaces are the most thoroughl

An updated fourth edition of the text that provides an understanding of chemical transformations and the formation of structures at surfaces The revised and enh

Silicon, the basic material for a multibillion-dollar industry, is the most widely researched and applied semiconductor, and its surfaces are the most thoroughl

This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engi

Experts and key personnel straddling academia and related agencies and industries provide critical data for further exploration and research.