Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays

This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new

Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays

Combining the two topics for the first time, this book begins with an introduction to the recent challenges in energy conversion devices from a materials prepar