The fifth in this series of conferences was held in Santander, Spain from 6 to 10 September 1993, and was attended by workers from industry and research institu

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defe

These proceedings provide an overview of research into defect inhomogeneities semiconductor materials and (as grown) devices. Defect inhomogeneities affect the