The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Sensors, Actuators, and Microsystems General Session¿, held

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. Th

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc

An introduction to the engineering principles of embedded systems, with a focus on modeling, design, and analysis of cyber-physical systems. The most visible us