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Type: BOOK - Published: 1983-12 - Publisher: Springer Science & Business Media

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Physical Chemistry of Semiconductor Materials and Processes
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The development of solid state devices began a little more than a century ago, with the discovery of the electrical conductivity of ionic solids. Today, solid s
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Technology of Si, Ge, and SiC / Technologie von Si, Ge und SiC
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Etching in Microsystem Technology
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Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the