In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build,

This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The conte

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to sub