Micro Electronic and Mechanical Systems
Author | : Kenichi Takahata |
Publisher | : BoD – Books on Demand |
Total Pages | : 528 |
Release | : 2009-12-01 |
ISBN-10 | : 9789533070278 |
ISBN-13 | : 9533070277 |
Rating | : 4/5 (277 Downloads) |
Download or read book Micro Electronic and Mechanical Systems written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2009-12-01 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.