Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films
| Author | : Kevin John Grannen |
| Publisher | : |
| Total Pages | : |
| Release | : 1994 |
| ISBN-10 | : OCLC:30771685 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films by : Kevin John Grannen
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