Plasma Processing 17
Author | : G. Mathad |
Publisher | : The Electrochemical Society |
Total Pages | : 89 |
Release | : 2008-11 |
ISBN-10 | : 9781566776653 |
ISBN-13 | : 1566776651 |
Rating | : 4/5 (651 Downloads) |
Download or read book Plasma Processing 17 written by G. Mathad and published by The Electrochemical Society. This book was released on 2008-11 with total page 89 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue of ECS Transactions contains papers presented at the International Symposium on Plasma Processing. The symposium, 17th in the series, cosponsored by the Dielectric Science & Technology, Electronics, and Photonics Divisions was held as part of the 213th Meeting of The Electrochemical Society, Inc., in Phoenix, AZ, USA, May 18 - 23, 2008. A total of 14 papers were presented from Belgium, Germany, Italy, Japan, Republic of Korea, Russia, and the USA on topics mainly focused on diagnostics & measurements and etching & deposition processes.