Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems

Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems
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Total Pages : 246
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ISBN-10 : OCLC:969122843
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Book Synopsis Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems by : Jer Hueih Chen

Download or read book Study of Effect of Rapid Thermal Oxidation on Silicon-silicon Germanium and Silicon-silicon Germanium Carbon Syatems written by Jer Hueih Chen and published by . This book was released on 1999 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Abstract: It is well known that the oxidation of Silicon will inject interstitial atoms into the bulk, causing various effects such as OED and OSF. The presence